9120 · In-Line Gasket Filter
GasPro 9120 in-line gasket filter protects critical valves, pressure regulators, mass flow controllers and other gas panel components in microelectronics gas delivery equipment. Compact in-line design installs inside standard face seal fittings by replacing an existing gasket, retrofitting into a gas panel without changing its footprint. All 316L stainless steel hardware and filtration media.
- Rated flow
- 20 slpm (@90 psig inlet / 2 psid)
- Filter rating
- 0.3 µm
- Filtration efficiency
- 97% at >0.3 µm · 99.9% at >0.4 µm
- Filter media / housing
- 316L Stainless Steel
Materials
| Rated flow | 20 slpm (@90 psig inlet / 2 psid) |
|---|---|
| Filter rating | 0.3 µm |
| Filtration efficiency | 97% at >0.3 µm · 99.9% at >0.4 µm |
| Filter media / housing | 316L Stainless Steel |
| Connects into | 1/4" Tube |
| Filter outside diameter | 0.16" (4 mm) |
| Length | 1.03" (26.1 mm) |
| Gasket outside diameter | 0.47" (11.9 mm) |
| Max differential pressure | 1,000 psid forward or reverse |
| Max operating temperature | 455°C (850°F) for inert gas applications |
| Housing finish | <10Ra surface finish or better, electropolished |
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