TEM-1700 · Ultra-High Purity All 316L In-Line Filter
GasPro TEM-1700 series all-316L welded ultra-high purity in-line filter for UHP semiconductor gases. 0.003 micron (3 nm) particle retention at low pressure drop in a compact, all-metal design. 7Ra electro-polished 316L housing, cleanroom manufactured, 100% helium tested to greater than 1×10⁻⁹ atm cc/second. Three flow ratings: 30, 75 and 150 slpm.
- Filter rating
- 3 nm (0.003 micron) particle retention
- Filter media / housing
- All-welded sintered 316L stainless fibre media and hardware
- Housing finish
- 316L stainless steel, 7Ra electro-polished
- Max operating temperature
- 450°C (842°F) in inert gas
Materials
| Filter rating | 3 nm (0.003 micron) particle retention |
|---|---|
| Filter media / housing | All-welded sintered 316L stainless fibre media and hardware |
| Housing finish | 316L stainless steel, 7Ra electro-polished |
| Max operating temperature | 450°C (842°F) in inert gas |
| Max operating pressure | 1770 Series: 3,000 psig (206.8 bar) at 20°C (68°F) · 1700 and 1740 Series: 2,500 psig (172.4 bar) at 20°C (68°F) |
| Leak test | 100% Helium tested to greater than 1×10⁻⁹ atm cc/second |
| Rated flow | 30 slpm (1.06 scfm) · 75 slpm (2.65 scfm) · 150 slpm (5.3 scfm) |
Applications & Documents
Configure your order
Select the variables exactly as they appear in the manufacturer datasheet. The full part number is assembled automatically.
Rated Flow
single select · 3 valuesInlet / Outlet Fittings
single select · 6 valuesHousing OD and Length
single select · 9 valuesSelect variables
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